Field maintenance and repair service, Engineers available to service machinery overseas
Place of Origin:
Flat panel display,Microelectronics,Semiconductor
Fiberglass or PTFE
0.45m/s or customizable
EC, AC, DC
EPDM or customizable
220V 1PH 50/60Hz, DC 48V
500 Piece/Pieces per Month
Packaging & Delivery
Carton and Wooden Crate
Equipment Fan Filter Unit (EFU) is an ultrathin fan filter used for equipment. It is widely used in cleanrooms to increase localized microenvironment cleanliness, and can stringently control the number of suspended particles, chemical and molecular contaminants.
Ultrathin, low noise level
The thickness of EFU can be as thin as 180 mm, using a variety of fans together with high-strength casing. The use of a special structure can effectively reduce disturbing flow, maximally reducing noise. Optional internal or external flanging structure, easy installation, operation and maintenance allows the EFU to be installed in different environments.
Intelligent system control EC EFU adopts eLisa control system, which can achieve large-scale integrated control and meanwhile control each EFU individually. The eLisa system can also indicated the followings: operator logging, energy consumption analysis, diagnosis, error messages and error localization, graphics, etc.
Negligible off-gassing properties All components used are made of low off-gassing materials and are meticulously tested. For the casing, stainless steel, Galvalume, DPCC, or aluminum can be selected. Equipped with PTFE filters containing little boron, sodium, potassium, silicon or other elements, the EFU has negligible off-gassing properties.
EFU Control System – eLisa
EC EFU can be controlled singly manually, or controlled by the eLisa system. eLisa uses a system hot and remote terminal system with a central computer as a client. The system can monitor the statuses of all the EFU and control each EFU individually, in sectors or in groups depending on the situation.